The 14AMI project is an EU-funded initiative carried out by a consortium of 31 partners. The project is dedicated to developing technological solutions for the 14 Angstrom CMOS node, including the integration of Complementary Field Effect Transistors (CFETs) and cutting-edge metrology techniques for wafer and mask inspection. The project addresses key pillars essential to enabling 14A manufacturing: lithography, metrology, and process module integration. By pushing the boundaries of innovation, 14AMI aims to help the industry maintain its pace in line with Moore’s Law.