Publications
Below you can find the listing of officially published results of our 14AMI project. The titles of the publications along with the venues where they have been published provide a concise reference to the project’s validated outputs and dissemination activities.
conference proceeding
Optimization of deformable mirror actuator geometry using machine learning methods
Proceedings Volume 13328, Adaptive Optics and Wavefront Control for Biological Systems XI, 2025
SPIE
10.1117/12.3042094
conference proceeding
Time-resolved characterization and analysis of pulsed ion sources by synchronized oaTOF-MS
Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA, 2024
conference proceeding
Detection of ions generated in an intense pulsed EUV-light beam using different interfaces to a high resolution TOF-MS
Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA, 2024
conference proceeding
Analysis of EUV-induced plasma ions using an ion transfer upstream a high resolution TOF-MS
56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany, 2025
conference proceeding
Scatterometry-informed machine learning study to determine bi-directional intercorrelation of adjacent patterning steps
Metrology, Inspection, and Process Control XXXIX, 2025
SPIE
10.1117/12.3051497
conference proceeding
Development and Characterization of Pulsed Ion Sources Coupled to oaTOFs
55th Annual Conference of the German Society for Mass Spectrometry, 2024, Freising, Germany, 2024
conference proceeding
Detection of Ions generated in an intense pulsed EUV-light beam using different interfaces to a high resolution TOF-MS
55th Annual Conference of the German Society for Mass Spectrometry, 2024, Freising, Germany, 2024
conference proceeding
Probing ions from deeply embedded plasmas: From simulation to realization
Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA, 2024
conference proceeding
Investigation of a novel long distance ion transfer unit
56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany, 2025
conference proceeding
Probing Ions from deeply embedded plasmas: Energy Distribution Analysis and Comparison of Ion Transfer
56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany, 2025
conference proceeding
A Comparison between the Simulation Efficiency of a Poisson and Coulomb based Particle
Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA, 2024
conference proceeding
Intercomparison Study of two High-Resolution TOF-MS for Ultra-Trace Detection
56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany, 2025
conference proceeding
Temporally Resolved Characterization of a Pulsed Ion Source using a Synchronized oaTOF-MS
Proceedings of the 72nd ASMS Conference on Mass Spectrometry and Allied Topics, 2024, Anaheim, CA, USA, 2024
conference proceeding
Further Development and Optimization of a Successfully Implemented Accumulation Ion Source
56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany, 2025
conference proceeding
Intercomparison Study of two High-Resolution TOF-MS for Ultra-Trace
56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany, 2025
conference proceeding
A Plasma/Electron Ionization Calibration Source for Absolute Ion Counting and Ion Density Measurements
55th Annual Conference of the German Society for Mass Spectrometry, 2024, Freising, Germany, 2024
conference proceeding
Deformable mirror characterization using novel Phase Tilted Interferometry method
56th Annual Conference of the German Society for Mass Spectrometry, 2025, Göttingen, Germany, 2025
conference proceeding
Sequential wafer map inspection via feedback loop with reinforcement learning
Proceedings Volume 13329, Quantitative Phase Imaging XI, 2025
SPIE
10.1117/12.3041952
peer reviewed article
Sequential wafer map inspection via feedback loop with reinforcement learning
Expert Systems with Applications, 2025, ISSN 0957-4174
Elsevier
10.1016/J.ESWA.2025.126996