
ASML Netherlands B.V.
About the company
ASML is a global innovation leader in the semiconductor industry, providing chipmakers with advanced lithography systems, metrology and inspection solutions, and the supporting software and services required to manufacture high performance microchips. ASML enables the development and manufacturing of ever smaller, faster and more energy efficient semiconductor devices using its holistic lithography approach.
Headquartered in the Netherlands, with offices across the United States, Europe, and Asia, ASML is firmly embedded in the European and global semiconductor ecosystems and works through an open innovation model with customers, suppliers, research institutes, and universities across Europe. ASML acts as architect and integrator of highly complex system level innovations, collaborating closely with partners to strengthen the semiconductor value chain.
Project contribution
ASML’s goals in the project focus on advancing EUV lithography technologies required for the 14 Å technology node, with emphasis on improving resolution, overlay accuracy, and throughput. In close collaboration with partners, the work addresses the evolution of the 0.55 NA EUV platform through the development of high‑NA imaging capabilities, higher source power, and optimized wafer handling architectures to support complex exposure schemes. Overall, the activities aim to translate technological innovations into scalable solutions compatible with high‑volume semiconductor manufacturing, supporting future node requirements and strengthening the European semiconductor ecosystem.