
Carl Zeiss SMT GmbH
About the company
Carl Zeiss Semiconductor Manufacturing Technology (SMT) GmbH is a member of the ZEISS group, an international technology corporation operating in the fields of optics and optoelectronics solutions. As a leading-edge equipment supplier to the global semiconductor industry, ZEISS offers a unique product portfolio in advanced lithography optics, photomask solutions and process control systems that are essential for modern chip fabrication. Thanks to manufacturing technologies from ZEISS, microchips are becoming increasingly smaller, more powerful, more energy-efficient – and more cost-effective. The electronic equipment in which these products are installed fosters global progress in a variety of disciplines, including technology, electronics, communications, entertainment, mobility and energy.
Project Contribution
Zeiss role in the 14AMI project by focuses on advancing EUV lithography optics and photomask equipment. Key contributions include the development and performance assessment of adaptive EUV mirrors with respect to their functionality and durability. A second line of activities focuses on generating insights into the optical lifetime of EUV optics. Furthermore, Zeiss works on simulation-supported repair of photomasks, accelerating repair processes to ensure higher precision and throughput.