Fastmicro B.V.
About the company
Fastmicro was founded as a result of 15 years of dedicated research and development, in collaboration with the Netherlands Organization for Applied Scientific Research (commonly known as TNO, its Dutch acronym) and ASML, focusing on pioneering surface particle measurement technologies. As an innovative metrology equipment and service supplier, specialized in advanced surface particle contamination inspection systems, Fastmicro develops fast, accurate and automated solutions to detect, measure, and analyse microscopic particles on critical surfaces to support the increasingly demanding quality and cleanliness requirements of the microtechnology industries - including semiconductor manufacturing, microelectronics, photonics, and other sectors where even the smallest contaminants can impact performance or yield.
The Fastmicro Sample Scanner has become an industry standard for measuring surface particle cleanliness in semiconductor manufacturing. What began as a solution for the most advanced lithography platforms has evolved into a common language for surface cleanliness across the industry. It is referenced in standards such as SEMI E195‑0925, embedded in semiconductor OEM cleanliness requirements for parts and assemblies. It is also trusted globally by fabs, toolmakers, and suppliers as the reference method for particle cleanliness.
Fastmicro regularly participates in leading semiconductor industry conferences and exhibitions, where global experts gather to address the rapidly evolving challenges of contamination control in advanced fabs.
Fastmicro is a globally recognized technology leader based in the Eindhoven Brainport area of The Netherlands, with sales offices and local representation in Europe, Taiwan, China, Japan, and the USA. For high tech manufacturers and process quality engineers who need accurate, reliable insights into particle contamination, Fastmicro is the leading provider of scientific contamination intelligence that delivers precise, data driven analysis for optimizing cleanliness processes. Unlike traditional measurement tools or manual evaluation methods, Fastmicro scanners combine scientific rigor, advanced analytics, and validated methodologies to enable confident, repeatable contamination control decisions.
Project contribution
For this EU project, the main roles of Fastmicro are as follows: providing fast particle measurements for cleanliness qualification on parts and modules—such as wafers and optics - by assessing particle count, location, and size; enabling continuous surface‑cleanliness monitoring in cleanrooms, controlled environments, and vacuum systems; and supporting direct surface cleanliness measurements on components to improve workflows and facilitate root‑cause analysis of particle contamination.
Fastmicro has objectives and deliverables in 14AMI Work Package WP2 (Lithography) and WP3 (Holistic Metrology). For WP2 Subtask 2, Fastmicro needs to develop parts qualification of the EUV illumination system and projection optics by direct particle measurements on the respective surfaces. On the other hand, Fastmicro contributes to WP3 Subtask 3 on Holistic Data Integration and Know How Generation and develops a robust software framework that enables seamless hybridization and plug and play integration of diverse metrology tools. Fastmicro is building data workflow capabilities and a fast particle counting and screening solution that detects deviations and pinpoints particle coordinates, enabling deeper follow up analysis—such as shape, material properties, and smaller scale features—using other metrology instruments. Data output from Fastmicro can be aligned with the data input for other 14AMI partners.