PFEIFFER VACUUM & FAB SOLUTIONS
About the company
Pfeiffer Vacuum SAS is a company based in Annecy (France), a 100% subsidiary of the European group Pfeiffer Vacuum AG since 2011, and part of Busch Group since 2024.
Pfeiffer Vacuum SAS activity, in both innovation and production areas, is mainly dedicated to semiconductors market, as a recognized specialist in vacuum products and solutions (turbo pumps, dry pumps, etc), and also leader in the field of contamination management for FOUP and cleanroom (Airborne Molecular Contamination [AMC] and particles)
Project contribution
The main target of Pfeiffer in 14AMI is to accelerate and simplify usage of real-time metrology sensor on vacuum process chamber especially thus related to spectroscopy techniques by developing and using AI-based algorithm to mastered all data inspection phase and thus remove need of long expertise for such implementation.
Moreover, even unknown compounds/events are expected to be in scope of metrology which
is not usually the case as such metrology are generally configured with pre-defined recipe.
Regarding 14AMI project, involved in WP4 in partnership with IMEC, Pfeiffer plans to address the OEM problematics of process chamber contamination thanks to closer relationships with these actors, and has the target to propose an optimized demonstrator at the end of the project.