
Plansee SE
About the company
Plansee: high-performance materials for the semiconductor industry
Plansee is the world’s largest manufacturer of powder-metallurgical components made from high-performance materials, and the leading supplier of products and solutions for the entire semiconductor supply chain. Our portfolio supports critical processes such as lithography, etching, thermal evaporation, PVD coating, ion-beam treatments, ion implantation, MOCVD and IC packaging. We also promote resource efficiency by offering global refurbishment services that increase the availability of reusable components.
With over 100 years of experience working with molybdenum, tungsten, tantalum and their alloys, we have the metallurgical expertise to fulfil the most demanding technical specifications, from developing new materials and components to precisely machining complex parts. Our decades of collaboration with semiconductor equipment manufacturers have given us a deep understanding of the market and a clear sense of what our customers need.
Plansee operates in 28 countries and runs 12 production facilities across Europe, Asia, and the United States. This enables us to provide a reliable and resilient global supply chain for components and assemblies.
A central element of our strategy is ensuring long-term raw material security. Through backward integration, we oversee critical stages from ore to finished product. This includes independent Western and Chinese supply chains, long-term partnerships with Molymet for molybdenum and with Global Tungsten & Powders (GTP) for tungsten powder.
GTP operates a highly integrated and RMI-certified production plant. These structures guarantee a secure supply, consistent quality and compliance with ethical sourcing standards, even in a volatile global environment. This integrated approach ensures stable access to tungsten and molybdenum for our customers, providing long-term reliability across all semiconductor applications.
Project contribution
From the earliest days of EUV technology, Plansee has been a trusted partner for performance-critical components in scanner and metrology equipment. Using refractory metals such as molybdenum and tantalum—selected for their resistance to liquid tin—Plansee’s contribution has evolved from individual machined parts to assemblies and fully integrated sub-modules. In the 14AMI project, Plansee supported customers already in the design and engineering phase to ensure manufacturability and robust series production of refractory-metal components. In parallel, key processes including drilling, milling, forming and tube drawing were developed and optimised, combining practical trials with computational modelling to accelerate development. The result: prototypes and sub-modules manufactured for EUV source demonstrators, strengthening readiness for next-generation platforms. A further 14AMI highlight was a new molybdenum alloy that pairs improved ductility with the mechanical performance required in demanding EUV environments. To enable reliable production, Plansee established and validated a powder-metallurgical route for this alloy, targeting tin delivery components for next-generation scanners and supporting operation at higher pressures. Overall, 14AMI reinforces Plansee’s role as an innovation and manufacturing partner for EUV—linking materials expertise, process development and scalable production.