National University of Science and Technology POLITEHNICA Bucharest
About the company
National University of Science and Technology POLITEHNICA Bucharest (UPB) represents the largest technical university from Romania, and among the biggest in South-Eastern Europe, having a history of over 200 years and an excellent tradition in education and scientific research. UPB specializes in advanced nanomaterial synthesis, 3D atomic- and nanoscale characterization, and design of macro-, micro-, and nano-scale devices and sensors for heterogeneous integration. Research outputs translate into patents, industrial deployment, and measurable societal impact, strengthening Europe’s technological ecosystem. Through European projects, collaborations, and training programs, UPB drives knowledge transfer, cross-border innovation, and the development of highly skilled specialists. All activities align with EU strategic priorities, supporting advanced packaging excellence, infrastructure interoperability, and European semiconductor sovereignty. UPB acts as a metrology hub in several EU projects, including 14AMI. Its unique capabilities and expertise have been used in a number of EU projects in ECSEL JU, KDT JU and CHIPS JU. Currently, UPB is involved in 8 European projects, including NanoIC, the pilot line developing beyond-2nm systems-on-chip.
Project contribution
UPB’s main objective in 14AMI is to serve as a metrology hub for the partners. For this purpose, UPB is involved in WP3, tasks 3.1, 3.2 and 3.3. In these tasks, UPB contributes with several metrologies such as TEM and SPM. Based on these, UPB is defining and implementing a novel metrological methodology (hybrid metrology based on combined SPM and e-beam methods) at lab level for nanoscale defects (point/complex defects, substrate thickness variation etc) localization and investigation with reduced cycle time on 14A technology. The novel metrological methodology enables the assessment of the complementarity/inter-dependence of the data (morphological, structural, electric, and compositional properties) resulted from the cross SPM (SPM-IR, sSNOM, SPFM-AC) and TEM/SEM (TEM-SEM-ZC-EDX, SEM-EDX) analysis performed on the same sample (including the same location).