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VDL Enabling Technologies Group
About the company

VDL Enabling Technologies Group (VDL ETG) specializes in designing, developing, and manufacturing of complex and innovative products and machines. With our unique combination of technical knowledge and a high level of craftmanship under one roof, we supply advanced high-tech components, modules, and systems to our customers. These include production equipment for the semiconductor industry, analytical instruments, and medical systems. Products that are characterized by their high complexity and relatively low production runs.

Our strengths include developing vacuum systems, fast handling techniques, and high-precision processes. This enables us to support the entire process from design or co-design, value engineering, and supply chain management to production, assembly, quality control, and component testing, including after-sales support. We therefore offer full-service experience from concept analysis to hands-on production development and realization.

From our locations across Europe, Asia, and the United States, we help customers all over the world make their vision a reality. And with our state-of-the-art facilities – from the very latest machine tools, high-speed milling, and ultra-precision lathes to advanced welding equipment and even 3D metal printers – we can make almost anything you can imagine.

Our cleanrooms provide the perfect environment for the ultra-clean assembly of mechanical and electrical modules, while our measuring rooms enables precise quality control and testing to ensure that each product meets the strictest requirements. With our facilities, we hold the key to innovation.

Project contribution


VDL ETG contribution is within WP2 Lithography, subtask 2.4.1: Wafer handling and conditioning. Partner in this subtask is ASML.

Key objectives are:

1.  Design, realization and validation of an intermediate storage for wafers (the so-called “stocker”). The stocker is part of the wafer handler system, intended to be used for wafers that need double exposure on the 0.55NA EUV scanner.

Including (final element) modelling and flow-, temperature- and contamination-control.

2.  Development and implementation of modular architecture for the wafer handler system. With the aim of improving reliability, availability and maintainability in the fab and reducing design cycles, development effort and total cost of ownership.

Contact

Get in touch with us if you want to know more about the 14AMI project.

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